Ultrasonic Element, Information Device, And Super-Directional Speaker

Abstract

An ultrasonic element includes: a substrate having a vibration region and a non-vibration region surrounding the vibration region; a first electrode disposed inside the vibration region; a piezoelectric body disposed on the substrate to cover the first electrode; and a second electrode provided on the piezoelectric body, in which a direction in which the substrate, the first electrode, the piezoelectric body, and the second electrode are stacked is a stacking direction, and a thickness of the substrate along the stacking direction is 2.0 μm or more and 10.0 μm or less.

Dependencies are inferred from the claim text.