Process for manufacturing a piezoelectric layer on a substrate

Abstract

A method of manufacturing a structure including a piezoelectric layer on a substrate involves:—forming, by a first epitaxy, a pseudomorphic seed layer of a first piezoelectric material on a donor substrate,—transferring the seed layer and a portion of the donor substrate onto a receiver substrate via at least one electrically insulating layer and/or at least one electrically conductive layer adapted to allow relaxation of the seed layer,—removing the transferred portion of the donor substrate so as to expose a surface of the seed layer,—and forming a monocrystalline layer of a second piezoelectric material on the seed layer.

Dependencies are inferred from the claim text.