Device and method for high resolution beam analysis
AssigneeLuxembourg Institute of Science and Technology (List)
InventorHung Quang HOANG
Life of this patent
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Abstract
A device and method for recording spectral information of charged particle beams, such as ion beams, or of light beams, at a high resolution. Specifically, a mass spectrometer having a focal plane detector. The device and method enable the recording of mass spectral data at both high mass resolving power and mass accuracy, during parallel acquisition of potentially the entire spectrum of a sample beam.
Claims16
An analytical device for analyzing an incoming charged particle beam or light beam, the analytical device comprising:
- a filtering instrument for producing, from said incoming charged particle beam or light beam, charged particle beams or light beams that are dispersed along a first direction, the filtering instrument further defining a focal plane extending in the first direction and in a second direction that is perpendicular to said first direction;
- position-sensitive charged particle or light detection means comprising a detection front extending downstream of, and in parallel to, said focal plane;
- at least one aperture plate is arranged on said focal plane, the aperture plate defining at least one high resolution slit extending in said second direction, for passing said dispersed charged particle beams or light beams through at a predetermined position of the aperture plate along said first direction, and
- displacement means for displacing respective positions along said first direction, at which said dispersed charged particle beams or light beams arrive on the aperture plate.
The analytical device according to claim 4, wherein the aperture plate holder is further configured to selectively hold said at least one aperture plate or said charged particle or light detection means.
Dependencies are inferred from the claim text.