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US 2026/0171346 A1Published application
Ion Milling Device and Ion Milling Method
AssigneeHitachi High-Tech Corporation
InventorsToru IWAYA, Hisayuki Takasu, Sakae Koubori
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Abstract
Provided is a machining technology to obtain a desired machining content while suppressing a possibility of causing a redeposition in a machining surface. The invention is directed to provide an ion milling device which includes an ion source which emits an ion beam, a sample holder which holds a sample, and a sample sliding mechanism which slides the sample holder in a direction including a normal direction of an axis of the ion beam.
Claims9
An ion milling device which emits an ion beam to a sample to machine the sample, comprising:
- an ion source which emits the ion beam;
- a sample holder which holds the sample of which at least a part is shielded by a mask;
- a sample sliding mechanism which slides the sample holder in a direction including a normal direction of an axis of the ion beam;
- a rotation mechanism which rotates and tilts the sample holder around an axis perpendicular to a direction of a sliding movement caused by the sample sliding mechanism;
- a user interface unit which is used to set a machining position in a multipoint milling which machines a plurality of places of the sample;
- and
- a control unit which controls a movement of the sample sliding mechanism based on information on the machining position which is set by the user interface unit,
- wherein the sample sliding mechanism is installed above the rotation mechanism, and a position of a rotation shaft of the rotation mechanism is constant.
5 more elements
Dependencies are inferred from the claim text.