Production method of monocrystalline silicon for epitaxial silicon wafer and production method of epitaxial silicon wafer
AssigneeSumco Corporation
InventorsYasuhito NARUSHIMA, Koichi MAEGAWA, Fukuo OGAWA, Yasufumi KAWAKAMI
Life of this patent
Estimating the term…
Abstract
A production method of a monocrystalline silicon includes adding red phosphorus in a silicon melt so that an electrical resistivity of the monocrystalline silicon falls in a range of 0.5 mΩ·cm or more and less than 0.7 mΩ·cm; and pulling up the monocrystalline silicon so that a time for a temperature of at least a part of a straight body of the monocrystalline silicon to be within a range of 570° C.±70° C. is in a range from 10 minutes to 50 minutes.
Claims8
A production method of a monocrystalline silicon, the method comprising:
- forming the monocrystalline silicon weighing 60 kg or more and 180 kg or less by contacting a seed crystal with a dopant-added melt contained within a crucible disposed inside a chamber of a monocrystal pull-up apparatus, the dopant-added melt comprising a silicon melt and red phosphorus added to the silicon melt;
- after bringing the seed crystal into contact with the dopant-added melt, pulling up the seed crystal with a pull-up unit contained in the monocrystal pull-up apparatus to pull up the monocrystalline silicon;
- and
- cooling the monocrystalline silicon;
- the method further comprising:
- adding the red phosphorus into the silicon melt so that an electrical resistivity of the monocrystalline silicon falls in a range of 0.5 mΩ·cm or more and less than 0.7 mΩ·cm,
- wherein:
- during the cooling, the monocrystalline silicon is pulled up a distance of 400 mm or more within 180 minutes after separating a tail of the monocrystalline silicon from the dopant-added melt,
- a time for a temperature of a part of a straight body of the monocrystalline silicon to be 570° C.±70° C. is in a range from 10 minutes to 50 minutes, and
- the part of the straight body of the monocrystalline silicon is included in a region of the straight body having a solidification percentage in a range from 52% to 87%.
A monocrystalline silicon comprising red phosphorus, an electrical resistivity of the monocrystalline silicon being 0.5 mΩ·cm or more and less than 0.7 mΩ·cm, wherein the monocrystalline silicon comprises a straight body comprising a crystalline region, a silicon wafer sliced from the crystalline region of the straight body having an LPD density of 90 nm or more of 2.5 per square centimeters or less on a surface of the silicon wafer, the LPD density being measured after applying a heat treatment in a hydrogen atmosphere at 1200° C. for 30 seconds.
Dependencies are inferred from the claim text.