Method and system for adjusting groove profile for laser grooving

A method for adjusting a groove profile for laser grooving, comprising:

• a wafer identification step:
• controlling, by a central processing unit, a scanning device to acquire color wafer images, converting the acquired color wafer images into grayscale images, identifying an edge of a wafer by using an edge detection algorithm Canny, and identifying a shape and dimensions of the wafer;
• a feature extraction step:
• extracting, by the central processing unit, shape features, geometric features, and edge features of the wafer, comprising edge smoothness S, edge continuity C, and histogram of oriented gradients (HOG) uniformity U of the wafer, and constructing a comprehensive feature vector Q by fusing the extracted wafer features;
• a groove profile feature input step:
• determining, based on a feature extraction result of the wafer and specific application requirements, specifications of a groove profile required to be designed, and inputting groove profile features into the central processing unit;
• a laser parameter setting step:
• defining, by the central processing unit based on the extracted wafer features, an objective function for evaluating grooving effects under different laser parameters, optimizing the laser parameters by using a particle swarm optimization (PSO) algorithm, and outputting the optimized laser parameters;
• a spot adjustment step:
• controlling, by the central processing unit, the scanning device to capture a current image of a laser spot and preprocessing the image, extracting edges, basic shape features and energy distribution features of the spot by using the algorithm Canny, and inputting the spot image into a convolutional neural network (CNN) model to generate specific spot adjustment parameters;
• and
• a grooving and inspection step:
• outputting, to a laser device by the central processing unit, the optimized laser parameters and the generated spot adjustment parameters, comprising laser power, a scanning velocity, and a focal length, performing a grooving operation, acquiring a groove profile image upon completion of grooving, performing contour detection and geometric property calculation on the groove profile based on the groove profile image, analyzing groove profile quality, and performing result evaluation and feedback.