Coating treatment method, storage medium, and coating treatment device
AssigneeTokyo Electron Limited
InventorsToyohisa TSURUDA, Kazuhiro SHIBA, Naoto NAKAMURA
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AssigneeTokyo Electron Limited
InventorsToyohisa TSURUDA, Kazuhiro SHIBA, Naoto NAKAMURA
Estimating the term…
A coating treatment method includes individually acquiring surface images of a plurality of substrates having, on surfaces thereof, different coating films formed by supplying a processing liquid of different ejection amounts, acquiring a plurality of polar-coordinate-converted images by converting the surface images of the plurality of substrates into polar coordinates, respectively, displaying one or more polar-coordinate-converted images of the plurality of polar-coordinate-converted images on a screen in association with information specifying ejection amounts of the processing liquid ejected to substrates from which corresponding images are captured, and determining an ejection amount of the processing liquid ejected to the substrates upon forming a coating film of the processing liquid based on an instruction of a user regrading display content of the screen.
A coating treatment method, comprising:
A coating treatment device, comprising:
Dependencies are inferred from the claim text.