Modular fitting assembly and system incorporating same
AssigneeIchor Systems, Inc.
InventorsLukas Sykora, Stephen Carson, Zachary Smith
Life of this patent
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Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on large numbers of fitting assemblies. Fitting assemblies often require tight tolerances, requiring expensive manufacturing processes. Fitting assemblies formed as multiple components can reduce manufacturing costs. Fitting assemblies may be formed of a housing having an insert receiving cavity and an insert having a port, a seal cavity, and a tube stub. A flow path extends from the port to the tube stub to enable flow of fluid therebetween.
Claims1
A system for processing articles, the system comprising:
- a fluid supply configured to supply a process fluid;
- a process chamber configured to process articles;
- and
- a fluid delivery module, the fluid delivery module comprising:
- an inlet fluidly coupled to the fluid supply;
- an outlet fluidly coupled to the process chamber;
- a flow passage extending from the inlet to the outlet;
- a substrate panel;
- a first component for controlling flow, the first component comprising a first port comprising a seal cavity, a second port comprising a seal cavity, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow passage;
- a plurality of substrate blocks, a first substrate block of the plurality of substrate blocks comprising a housing and an insert, the insert comprising a port and a second flow path extending from the port, the port comprising a seal cavity, the second flow path forming a second portion of the flow passage, and the insert positioned within an insert receiving cavity of the housing;
- and
- a seal positioned within the seal cavity of the first port of the first component and the seal cavity of the insert of the first substrate block;
- wherein the plurality of substrate blocks are in contact with the substrate panel and the first component is coupled to the substrate panel and the first substrate block.
Dependencies are inferred from the claim text.