Semiconductor device
AssigneeRohm Co., Ltd.
InventorKosaku ADACHI
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Abstract
A semiconductor device includes a semiconductor substrate, an insulating layer provided on the semiconductor substrate, a first high resistance unit embedded in the insulating layer and disposed so as to surround a first electrode in a plan view, a second high resistance unit embedded in the insulating layer and disposed so as to surround a second electrode in a plan view, and low resistance units for voltage detection that are electrically connected to the first high resistance unit and the second high resistance unit, and have lower resistances than the first high resistance unit and the second high resistance unit.
Claims7
A semiconductor device, comprising:
- a semiconductor substrate;
- an insulating layer provided on the semiconductor substrate;
- a first high-resistance unit embedded in the insulating layer and disposed so as to surround a first electrode in a plan view;
- a second high-resistance unit embedded in the insulating layer and disposed so as to surround a second electrode in a plan view;
- and
- low-resistance units for voltage detection that are electrically connected to the first high-resistance unit and the second high-resistance unit, and have lower resistances than the first high-resistance unit and the second high-resistance unit.
Dependencies are inferred from the claim text.