Laser processing unit

Abstract

A laser-processing unit includes: a scanner configured to scan a laser beam over a mask; a mask stage with a mask table, the mask stage configured to move the mask table in a main scanning direction and a sub-scanning direction, a mask being mounted on the mask table; a processing stage with a workpiece table, the processing stage configured to move the workpiece table in the main scanning direction and the sub-scanning direction, a workpiece being mounted on the workpiece table; a projection optical system configured to project a pattern beam that passes through the mask onto the workpiece mounted on the workpiece table; a mask alignment mechanism configured to detect alignment marks on the mask; and a workpiece alignment mechanism configured to detect alignment marks on the workpiece. The workpiece alignment mechanism is attached to a lens barrel of the projection optical system.

Dependencies are inferred from the claim text.