Contactless photoacoustic temperature sensors for device manufacturing chambers

A temperature sensor system, comprising:

• a light source to direct a beam of light to a first location of a target object within a chamber of a device manufacturing system;
• an optical sensor to determine one or more characteristics of a displacement of a surface of the target object at a second location, the displacement caused by propagation of one or more acoustic waves between the first location and the second location;
• and
• a processing device to determine, using the one or more characteristics of the displacement, a temperature of the target object.

A device manufacturing system, comprising:

• a plurality of chambers, comprising:
• a transfer chamber;
• and
• one or more processing chambers;
• a temperature sensor, comprising:
• a light source to direct a beam of light to a first location of a target object within one of the plurality of chambers;
• an optical sensor to determine one or more characteristics of a displacement of a surface of the target object at a second location, the displacement caused by propagation of one or more acoustic waves between the first location and the second location;
• and
• a processing device to determine, using the one or more characteristics of the one, a temperature of the target object.