Polishing pad, polishing apparatus, method for producing polishing pad and method for producing polished object
AssigneeCanon Kabushiki Kaisha
InventorsYUSUKE SHUKUWA, SHUN OUCHI
Life of this patent
Estimating the term…
Loading patent…
AssigneeCanon Kabushiki Kaisha
InventorsYUSUKE SHUKUWA, SHUN OUCHI
Estimating the term…
A polishing pad that may obtain high polishing rate and high processing quality. A polishing pad having a resin including a void. A surface layer forming a surface to be a polishing surface of the polishing pad comprises a first resin. A region of the polishing pad comprises a second resin. When a value of a circle-equivalent diameter of the void in the polishing surface is defined as a void diameter of a front surface, and a value of a circle-equivalent diameter of the void in a surface opposite to the polishing surface is defined as a void diameter of a back surface, a difference between the void diameter of the front surface and the void diameter of the back surface is within 15%.
A polishing pad comprising:
A polishing apparatus comprising:
A method for producing a polishing pad, the method comprising:
Dependencies are inferred from the claim text.