High-frequency power supply device and output control method for high-frequency power

A high-frequency power supply device, comprising:

• a pair of amplifiers;
• and
• a combiner that combines amplifier outputs of the pair of the amplifiers to generate high-frequency pulse output power, wherein the high-frequency power supply device also comprising:
• a first control unit that perform DC voltage control for controlling a DC voltage Vdc to be supplied to the pair of the amplifiers to thereby control the output power;
• a second control unit that performs phase difference control on the output power by using phase difference φ between control signals used for controlling the amplifier outputs of the pair of the amplifiers,
• wherein the DC voltage control by the first control unit and the phase difference control by the second control unit are changed depending on an output level of the output power.

A high-frequency power supply device, comprising:

• a pair of amplifiers;
• a combiner that combines amplifier outputs of the pair of the amplifiers to generate high-frequency pulse output power;
• a power control unit that computes a DC voltage command value Vref* used for DC voltage control and a phase difference command value φ* used for phase difference control in the control on the high-frequency pulse output power;
• a DC voltage control unit that performs the DC voltage control on a DC voltage Vdc to be supplied to the pair of the amplifiers based on the DC voltage command value Vref*;
• and
• a control signal generation unit that generates control signals to be used for the phase difference control on the pair of the amplifiers based on the phase difference command value φ*,
• wherein the power control unit performs at an output level of the output power:
• (a) computation of the DC voltage command value Vref* for the DC voltage control in a range of high-output level;
• and
• (b) computation of the phase difference command value φ* for the phase difference control in a range of low-output level,
• so as to change the DC voltage control and the phase difference control depending on the output level of the output power.

An output control method for high-frequency power for varying high-frequency pulse output power by controlling a pair of amplifiers, wherein

• DC voltage control and phase difference control (CNTL2) are changed depending on an output level, so as to:
• (a) control the output power by performing DC voltage control for controlling a DC voltage Vdc to be supplied to the pair of the amplifiers in a high-output level range of the output level;
• and
• (b) control the output power by performing phase difference control for controlling a phase difference φ between control signals to be input to the pair of the amplifiers in a low-output level range of the output level.