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US 2026/0153723 A1Published application
Drive device, optical system and lithography apparatus
OwnerOliver HERBST, Stefan WALZinventors
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Abstract
A drive device for driving at least one actuator for actuating an optical element of an optical system comprises: an output stage configured to amplify an input voltage into a drive voltage for the actuator using a quiescent current of the output stage; and a providing device configured to set the quiescent current for the output stage depending on at least one parameter indicative of a power loss of the optical system.
Claims21
A drive device configured to drive an actuator to actuate an optical element of an optical system, the drive device comprising:
- an output stage configured to amplify an input voltage into a drive voltage for the actuator via a quiescent current of the output stage;
- and
- a providing device configured to set the quiescent current for the output stage depending on at least parameter selected from the group consisting of a determined temperature of the optical element, a target temperature of the optical element, a determined temperature of the actuator, a target temperature of the actuator, a determined temperature of the drive device, a target temperature of the drive device, a specific dynamic requirement for the output stage, and a target position of the optical element.
An optical system, comprising:
- a plurality of optical elements;
- a plurality of actuators, each actuator configured to actuate a corresponding optical element;
- and
- a plurality of drive devices,
- wherein:
- each actuator is assigned a corresponding drive device to drive the actuator;
- and
- for at least one of the drive devices, the drive device comprises:
- an output stage configured to amplify an input voltage into a drive voltage for the assigned actuator via a quiescent current of the output stage;
- and
- a providing device configured to set the quiescent current for the output stage depending on at least parameter selected from the group consisting of a determined temperature of the optical element assigned to the actuator which is assigned to the drive device, a target temperature of the optical element assigned to the actuator which is assigned to the drive device, a determined temperature of the actuator assigned to the drive device, a target temperature of the actuator assigned to the drive device, a determined temperature of the drive device, a target temperature of the drive device, a specific dynamic requirement for the output stage, and a target position of the optical element assigned to the actuator which is assigned to the drive device.
8 more elements
An apparatus, comprising:
- an illumination optical unit;
- and
- a projection optical unit,
- wherein the illumination optical unit comprises an optical system according to
1 more element
Dependencies are inferred from the claim text.