System and method for measuring a quantity of a known gas
AssigneeInficon GmbH
InventorShawn Wilson
Life of this patent
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AssigneeInficon GmbH
InventorShawn Wilson
Estimating the term…
A system and method for continuously monitoring and measuring a quantity of a reference gas includes providing a reference gas and measuring a thermal conductivity of the reference gas via a gas analyzer and calculating a purity threshold value based on the measured thermal conductivity of the reference gas. A mixture of gases containing the reference gas is then provided and a thermal conductivity of the mixture of gases is continuously measured via the gas analyzer. The measured thermal conductivity of the mixture of gases is compared to the purity threshold value, and a purity threshold level of the reference gas in the mixture of gases is indicated once the measured thermal conductivity of the mixture of gases reaches the purity threshold value.
A system for continuously monitoring and measuring a quantity of a reference gas, comprising:
A method for continuously monitoring and measuring a quantity of a reference gas in a mixture of gases, comprising the steps of:
A method for detecting a quantity of hydrogen gas during a purge of at least one other gas with the hydrogen gas, comprising the steps of:
Dependencies are inferred from the claim text.