Spectrometer, module and method for correcting misalignment of a laser beam with a lens' optical axis
AssigneeRenishaw PLC
InventorsBrian John Edward SMITH, James Roderick PARKER
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AssigneeRenishaw PLC
InventorsBrian John Edward SMITH, James Roderick PARKER
Estimating the term…
A spectrometer including a laser for generating a laser beam, a lens for directing the laser beam to a location of a sample, and a component for directing the laser beam to the lens so as to be co-axial with the lens' optical axis, the spectrometer including a beam splitter for directing the part of the laser beam towards a sensor arranged such that part of the laser beam can be used for monitoring alignment of the laser beam with the lens' optical axis, and wherein the spectrometer comprises a laser beam path correction element. Optionally the spectrometer includes an element for directing the part of the laser beam towards a sensor.
A spectrometer comprising a laser for generating a laser beam, a lens for directing the laser beam to a location of a sample, and a component for directing the laser beam to the lens so as to be co-axial with the lens' optical axis, the spectrometer comprising a beam splitter for directing the part of the laser beam towards a sensor arranged such that part of the laser beam can be used for monitoring alignment of the laser beam with the lens' optical axis, and wherein the spectrometer comprises a laser beam path correction element.
A method of monitoring alignment of a laser beam of a spectrometer with an optical axis of a lens of the spectrometer comprising using information relating to the location of a laser beam on a component and/or using information relating to a direction of the laser beam towards and/or away from the component, comprising moving a beam splitter and a laser beam path correction element to a position where the beam splitter and the laser path correction element are in the laser beam path from a position where the beam splitter and the laser path correction element are not in the laser beam path.
A module for a spectrometer comprising a first sensor for detecting the position of a laser beam thereon, a second sensor for detecting the position of a laser beam thereon, and abeam splitter for directing at least part of a laser beam towards the first sensor and the second sensor, wherein the module comprises a laser beam path correction element.
A processor configured to cause movement of a beam splitter and a laser beam path correction element into a laser beam path, and to receive a first input relating to the position of a laser beam, a second input relating to the position of the laser beam, wherein based on the first input and the second input the processor calculates parameters for reducing misalignment of the laser beam with a lens' optical axis.
Dependencies are inferred from the claim text.