Gate valve with speed controller using cda
AssigneeASM IP Holding B.V.
InventorKoei Aida
Life of this patent
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AssigneeASM IP Holding B.V.
InventorKoei Aida
Estimating the term…
Gate valve with open/close speed control capability is presented. To control open/close speed, the present disclosure presents a housing; an air cylinder configured to move a first shaft vertically up to a first position, the first shaft being connected to the air cylinder; a cam unit including a cam attached to the first shaft at one end; a second shaft connected at opposite end of the cam and configured to move along with the cam to a certain height; a first bellows disposed around the second shaft; a seal plate disposed at an end of the second shaft and configured to close a passage to/from a chamber; a seal ring disposed around the seal plate and configured to seal up the passage when the seal plate closes the passage; and a CDA unit configured to control an open/close speed of the gate valve.
A gate valve with speed control capability, the gate valve comprising:
Dependencies are inferred from the claim text.