Back to results
US 2026/0149428 A1Published application
Acoustic wave device, filter, and multiplexer
AssigneeTaiyo Yuden Co., Ltd.
InventorsSatoshi IMASU, Ryohei KOMIYAMA, Koichi SATO, Ryusuke UMEDA, Kaoru SAKINADA
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes a piezoelectric layer and a pair of interdigital electrodes including electrode fingers. Each of the electrode fingers includes a first layer provided on the piezoelectric layer and having an electrical resistivity of more than 1272 Ω·nm and 25038 Ω·nm or less, and a second layer provided on the first layer and having an electrical resistivity smaller than that of the first layer.
Claims20
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- a pair of interdigital electrodes including electrode fingers, each of the electrode fingers including a first layer provided on the piezoelectric layer and having an electrical resistivity of more than 1272 Ω·nm and 25038 Ω·nm or less, and a second layer provided on the first layer and having an electrical resistivity smaller than that of the first layer.
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- a pair of interdigital electrodes including electrode fingers, each of the electrode fingers having a first layer provided on the piezoelectric layer and being a titanium aluminum nitride layer, a chromium aluminum nitride layer, a chromium nitride layer, a diamond-like carbon layer, or a titanium carbonitride layer, and a second layer provided on the first layer and being a metal layer formed of a metal having an electrical resistivity smaller than that of the first layer.
An acoustic wave device comprising:
- a piezoelectric layer having a surface with an arithmetic average roughness Ra of 0.60 nm or less, and
- a pair of interdigital electrodes including electrode fingers, each of the electrode fingers including a first layer provided on the piezoelectric layer and a second layer provided on the first layer, the second layer having a thickness equal to or greater than a thickness of the first layer and being an aluminum layer or an aluminum alloy layer having an electric resistivity smaller than that of the first layer.
Dependencies are inferred from the claim text.