Refillable lamp for laser sustained plasma light source

A laser-sustained broadband light source comprising:

• a refillable lamp assembly configured to define a sealed internal volume, wherein the refillable lamp assembly comprises:
• a transparent lamp body defining a sealed internal volume;
• and
• a glass-to-metal fitting comprising a lamp flange, wherein a glass-to-metal seal hermetically couples the transparent lamp body and the glass-to-metal fitting to provide a fluid connection between the transparent lamp body and the lamp flange,
• wherein the lamp flange is configured to couple to an external gas fitting configured to supply and remove a working gas to and from the sealed internal volume;
• a gas-handling system configured to supply and remove a working gas to and from the sealed internal volume via the lamp flange;
• a pump laser source configured to direct a pump beam into the sealed internal volume to sustain a plasma in the working gas;
• and
• a light collector element configured to collect broadband light from the plasma.

A characterization system comprising:

• a laser-sustained light source comprising:
• a refillable lamp assembly configured to define a sealed internal volume, wherein the refillable lamp assembly comprises:
• a transparent lamp body defining a sealed internal volume;
• and
• a glass-to-metal fitting comprising a lamp flange, wherein a glass-to-metal seal hermetically couples the transparent lamp body and the glass-to-metal fitting to provide a fluid connection between the lamp body and the lamp flange,
• wherein the lamp flange is configured to couple to an external gas fitting configured to supply and remove a working gas to and from the sealed internal volume;
• a gas-handling system configured to supply and remove a working gas to and from the sealed internal volume via the lamp flange during plasma operation;
• a pump laser source configured to direct a pump beam into the sealed internal volume to ignite and sustain a plasma in the working gas;
• and a light collection assembly configured to collect broadband optical emission from a plasma;
• and
• a light collector element configured to collect broadband light from the plasma,
• wherein the characterization system further comprises:
• a set of illumination optics configured to direct broadband light from the laser-sustained light source to one or more samples;
• a set of collection optics configured to collect light emanating from the one or more samples;
• and
• a detector assembly.

A method comprising:

• providing a refillable lamp assembly defining a sealed internal volume, the refillable lamp assembly comprising:
• a transparent lamp body;
• a glass-to-metal seal hermetically coupled to the transparent lamp body;
• and
• a glass-to-metal fitting coupled to the glass-to-metal seal and configured to interface with an external gas fitting;
• coupling an external gas fitting to the glass-to-metal fitting;
• supplying a working gas to the sealed internal volume via the external gas fitting and the glass-to-metal fitting;
• directing a pump beam from a pump laser source into the sealed internal volume to sustain a plasma in the working gas;
• and
• collecting broadband light from the plasma.