Photovoltaic cell preparation method and photovoltaic cell

Abstract

Photovoltaic cell preparation method, and photovoltaic cell, method includes: preparing substrate including first surface and second surface opposite to each other, wherein first surface is textured structure; placing substrate into ALD deposition chamber; sequentially depositing aluminum-silicon layer and alumina layer on first surface; placing substrate having aluminum-silicon layer and alumina layer into PECVD deposition chamber; depositing silicon nitride layer on alumina layer; feeding ammonia gas into PECVD deposition chamber, and turning on radio frequency power supply to ionize hydrogen ions from ammonia gas; and diffusing hydrogen ions into aluminum-silicon layer. The aluminum-silicon layer forms aluminum-silicon bond on first surface of substrate Hydrogen ions are diffused to aluminum-silicon layer to form aluminum-hydrogen bond. When ultraviolet light is irradiated, aluminum-hydrogen bond reduces possibility of damage caused by ultraviolet light to silicon-hydrogen bond on the surface of silicon layer, and reduces chemical passivation loss of photovoltaic cell, thereby improving conversion efficiency.

Dependencies are inferred from the claim text.