Bulk acoustic wave (baw) resonator including bilateral dielectric layers for improved quality factor and method of making

Abstract

As the frequencies of microacoustic filter applications increase to address the needs of future technologies, the quality factor Q, which is a measure of energy efficiency, decreases, and the performance of microacoustic filters based on BAW resonators correspondingly decreases. In an exemplary BAW resonator, dielectric layers are disposed on each side of a piezoelectric layer and between the top and bottom electrode layers, which may be formed of metal, to reduce the acoustic/viscous losses that occur in the electrode layers. Inclusion of the bilateral dielectric layers between the top and bottom electrode layers shifts more energy to non-metallic layers to reduce acoustic energy losses. In some examples, a thickness of each of the dielectric layers may be up to thirty percent of a distance between the top and bottom electrode layers.

Dependencies are inferred from the claim text.