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US 2026/0140138 A1Published application
Cryo-Compatible Sample Holder for In-Situ Microscopy and Sample Characterization
AssigneeMassachusetts Institute of Technology
InventorsDirk Robert ENGLUND, Jawaher ALMUTLAQ, Mohamed ElKabbash
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Abstract
A sample holder for advanced in-situ microscopy is described. The sample holder includes integrated devices to apply external fields and other stimuli to samples being inspected. The integrated devices can emulate operating environments for the samples. The sample holder and advanced microscopy can be used to study quantum characteristics and properties of samples.
Claims23
A sample holder for micrometer-scale microscopy, the sample holder comprising:
- a bulk substrate;
- and
- a process stack disposed on the bulk substrate, the process stack comprising:
- apertures devoid of material passing through the process stack to allow electrons or ions to pass through the apertures when using the sample holder for the micrometer-scale microscopy;
- and
- at least one patterned feature forming an etch mask for etching the apertures through the process stack.
3 more elements
Dependencies are inferred from the claim text.