Integrated multiplexing measurement system

Abstract

An integrated multiplexing measurement system for measuring semiconductor devices (compound semiconductors) includes a main body, a fringe interferometer device, a white light interferometer probe, and a color conjugate focus measurement probe. The fringe interferometer device, the white light interferometer probe, and the color conjugate focus measurement probe are disposed in the main body. The fringe interferometer device is used to measure the warpage, concavity, color, brightness distribution, shape, and distribution of high-nitrogen areas of semiconductor devices. The white light interferometer probe and the color conjugate focus measurement probe are disposed together. The white light interferometer probe measures the surface roughness and surface depth of semiconductor devices. The color conjugate focus measurement probe (dispersion probe) measures the surface roughness and thickness of semiconductor devices.

Dependencies are inferred from the claim text.