Thermo-optic phase shifters
AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Oscar Restrepo, Brian McGowan
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Abstract
Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide core, a heater, a first plurality of segments positioned between a portion of the waveguide core and the heater, and a second plurality of segments positioned between the portion of the waveguide core and the heater. The first plurality of segments comprise a first material, the second plurality of segments comprise a second material, and the second plurality of segments alternate with the first plurality of segments.
Claims20
A structure for a thermo-optic phase shifter, the structure comprising:
- a first waveguide core including a portion;
- a first heater;
- a first plurality of segments positioned between the portion of the first waveguide core and the first heater, the first plurality of segments comprising a first material;
- and
- a second plurality of segments positioned between the portion of the first waveguide core and the first heater, the second plurality of segments comprising a second material, and the second plurality of segments alternating with the first plurality of segments.
A method of forming a structure for a thermo-optic phase shifter, the method comprising:
- forming a waveguide core;
- forming a heater;
- forming a first plurality of segments positioned between a portion of the waveguide core and the heater, wherein the first plurality of segments comprise a first material;
- and
- forming a second plurality of segments positioned between the portion of the waveguide core and the heater, wherein the second plurality of segments comprise a second material, and the second plurality of segments alternate with the first plurality of segments.
Dependencies are inferred from the claim text.