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US 2026/0133369 A1Published application
Micro-ring resonator filters
AssigneeGlobalFoundries U.S. Inc.
InventorsAneesh Dash, Pratyasha Priyadarshini
Life of this patent
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Abstract
Structures for a micro-ring resonator filter and methods of forming a structure for a micro-ring resonator filter. The structure comprises a bus-ring coupling section including a first Mach-Zehnder interferometer, and a micro-ring resonator section including a ring resonator coupled to the first Mach-Zehnder interferometer. The ring resonator includes a second Mach-Zehnder interferometer.
Claims20
A structure for a micro-ring resonator filter, the structure comprising:
- a bus-ring coupling section including a first Mach-Zehnder interferometer;
- and
- a micro-ring resonator section including a ring resonator coupled to the first Mach-Zehnder interferometer, the ring resonator including a second Mach-Zehnder interferometer.
A method of forming a structure for a micro-ring resonator filter, the method comprising:
- forming a bus-ring coupling section including a first Mach-Zehnder interferometer;
- and
- forming a micro-ring resonator section including a ring resonator coupled to the first Mach-Zehnder interferometer, wherein the ring resonator includes a second Mach-Zehnder interferometer.
Dependencies are inferred from the claim text.