Synthesis of monolayer transition metal dichalcogenides by electrostatic self-assembly
AssigneeCalifornia Institute of Technology
InventorsDaniel Anderson, Nai-Chang Yeh
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Abstract
A method of growing a transition metal dichalcogenide includes providing a substrate and positioning the substrate in a furnace. The method also includes reducing a transition metal compound to produce a plurality of reduced transition metal compounds. The plurality of reduced transition metal compounds is electrostatically aligned on the substrate. The method further includes reacting the plurality of reduced transition metal compounds with a chalcogen precursor to form one or more layers of a transition metal dichalcogenide.
Claims20
A method of growing a transition metal dichalcogenide, the method comprising:
- providing a substrate;
- positioning the substrate in a furnace;
- reducing a transition metal compound to produce a plurality of reduced transition metal compounds, wherein the plurality of reduced transition metal compounds is electrostatically aligned on the substrate;
- and
- reacting the plurality of reduced transition metal compounds with a chalcogen precursor to form one or more layers of a transition metal dichalcogenide.
A method of growing a transition metal dichalcogenide, the method comprising:
- providing a substrate;
- positioning the substrate in a furnace;
- flowing a reductant gas including an alkali metal into the furnace;
- flowing a precursor gas including a transition metal into the furnace;
- reducing the transition metal to produce a plurality of reduced transition metal compounds;
- condensing the plurality of reduced transition metal compounds onto the substrate, wherein each of the plurality of reduced transition metal compounds is electrostatically aligned to adjacent reduced transition metal compounds of the plurality of reduced transition metal compounds;
- flowing a chalcogen containing gas into the furnace;
- and
- converting the plurality of reduced transition metal compounds to one or more layers of a transition metal dichalcogenide.
Dependencies are inferred from the claim text.