Method and apparatus for gas-driven jet polishing and application thereof
AssigneeThe Hong Kong Polytechnic University
InventorsZili ZHANG, Chunjin WANG, Benny CHEUNG
Life of this patent
Estimating the term…
Abstract
A method and an apparatus for gas-driven jet polishing and an application thereof are provided. The method for gas-driven jet polishing, includes the following steps: obtaining a polishing slurry comprising a nano-abrasive, a dispersion aid, and a solvent; and immersing at least a surface to be polished of a workpiece in the polishing slurry, and polishing the surface to be polished of the workpiece by forming a gas jet in the polishing slurry using a gas pressure.
Claims20
A method for gas-driven jet polishing, comprising the following steps:
- obtaining a polishing slurry comprising a nano-abrasive, a dispersion aid, and a solvent;
- and
- immersing at least a surface to be polished of a workpiece in the polishing slurry, and polishing the surface to be polished of the workpiece by forming a gas jet in the polishing slurry using a gas pressure.
An apparatus for gas-driven jet polishing, comprising:
- a polishing container, configured to hold a polishing slurry and a workpiece which is to be polished;
- a gas flow nozzle, configured to be immersed in the polishing slurry in the polishing container during operation;
- and
- a controller, configured to control a gas flow at an outlet of the gas flow nozzle to form a gas jet toward the workpiece in the polishing slurry.
Dependencies are inferred from the claim text.