Detachable purifier and supply system comprising the same

A supply system comprising:

• a supply pipe configured to supply a fluid to the supply system;
• and
• a purifier configured to be detachably connected to the supply pipe;
• wherein the purifier comprises:
• a compressor configured to pressurize the fluid supplied by the supply pipe;
• a buffer tank connected to the compressor and configured to store the fluid pressurized by the compressor;
• a particle filter connected to the buffer tank and configured to filter out impurities in the fluid;
• and
• a dehumidifying filter connected to the buffer tank and configured to filter out moisture within the fluid, and
• wherein the buffer tank is provided between the particle filter and the dehumidifying filter.

A method of recovering process fluid comprising:

• providing a fluid at an initial pressure to an inlet of a semiconductor manufacturing process apparatus from an upstream fluid supply;
• performing a process by the semiconductor manufacturing process apparatus using the fluid and outputting used fluid from an outlet of the semiconductor manufacturing process apparatus;
• redirecting the used fluid output from the outlet of the semiconductor manufacturing process apparatus to an inlet pipe of a mobile purifier to introduce the used fluid into the mobile purifier;
• compressing the used fluid with the mobile purifier to a return pressure that is greater than the initial pressure of the fluid to produce a purified fluid;
• and
• returning purified fluid to the inlet of the semiconductor manufacturing process apparatus.