Methods of depositing thermally conductive polymeric films

A method of depositing a polymeric film, the method comprising:

• pre-treating a substrate;
• flowing a first precursor over the substrate, the first precursor having a general formula R1-(X)n, where R1 comprises one or more of an alkyl group, an alkenyl group, an aryl or aromatic group, and a cycloalkyl group, (X)n comprises one or more of a hydroxide group, an aldehyde group, a ketone group, an acid group, an amino group, an isocyanate group, a thiocyanate group, and an acyl chloride group, and n is an integer in a range of from 1 to 6;
• removing a first precursor effluent comprising the first precursor;
• flowing a second precursor over the substrate to react with the first precursor to form the polymeric film on the substrate, the second precursor having a general formula R2-(Y)n, where R2 comprises one or more of an alkyl group, an alkenyl group, an aryl or aromatic group, and a cycloalkyl group, (Y)n comprises one or more of a hydroxide group, an aldehyde group, a ketone group, an acid group, an amino group, an isocyanate group, a thiocyanate group, and an acyl chloride group, and n is an integer in a range of from 1 to 6;
• removing a second precursor effluent comprising the second precursor;
• and
• performing a heat treatment process.