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US 2026/0130105 A1Published application
Film Manufacturing Method, Laminated Structure, and Bolometer
AssigneeNEC Corporation
InventorNoriyuki TONOUCHI
Life of this patent
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Abstract
A film manufacturing method includes forming a first self-organized film on a substrate, drying the formed first self-organized film, immersing the dried first self-organized film in a dissolving solution in which a silane coupling agent is dissolved to form a second self-organized film, drying the formed second self-organized film, and laminating a nanocarbon layer on the dried second self-organized film.
Claims11
A film manufacturing method comprising:
- forming a first self-organized film on a substrate;
- drying the formed first self-organized film;
- immersing the dried first self-organized film in a dissolving solution in which a silane coupling agent is dissolved to form a second self-organized film;
- drying the formed second self-organized film;
- and
- laminating a nanocarbon layer on the dried second self-organized film.
3 more elements
A laminated structure including, in order, a substrate, a self-organized film, and a nanocarbon layer having an alignment parameter, wherein
- the alignment parameter has an alignment component and a random component,
- a function of the alignment component is expressed by a formula:
- S
- 2
-
- D
- a
-
- l
-
- i
-
- g
-
- n
- (
- d
- )
- =
- S
- full
- +
- (
- 1
- -
- S
- full
- )
-
- e
- -
- d
- 2
-
- λ
- c
- ,
- wherein λc is a damping constant related to the degree of local alignment, d is a size of one side of a square observation area of the nanocarbon layer, and Sfull is a constant value, and
- the damping constant is 300 nm or more.
36 more elements
Dependencies are inferred from the claim text.