Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya KIMURA, Hisashi YAMAZAKI, Katsumi SUZUKI
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya KIMURA, Hisashi YAMAZAKI, Katsumi SUZUKI
Estimating the term…
An acoustic wave device includes a support including a support substrate with a thickness direction in a first direction, a piezoelectric layer on the support, and resonators each including a functional electrode provided to the piezoelectric layer. The support is provided with a hollow portion at a position overlapping at least a portion of each of the resonators in plan view in the first direction. The resonators include a first resonator and a second resonator adjacent to each other. A through hole reaching the hollow portion is provided to the piezoelectric layer between the first resonator and the second resonator.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.