Sample damage avoidance in devices and methods for sample processing and sample repair

Abstract

A method for potential determination pertaining to a sample comprises: positioning a probe above the sample; applying at least a first and a second DC voltage offset each from a first range; applying an AC voltage to the probe for the purpose of inducing a mechanical oscillation of the probe; determining a first induced deflection of the probe for the first DC voltage offset and a second induced deflection of the probe for the second DC voltage offset; and determining a potential outside an interval spanned by the first and second DC voltage offsets at least partly on the basis of the first and second deflections. A method for causing approach by a probe towards a sample comprises: causing approach by the probe towards the sample; repeatedly determining a deflection of the probe during the process of causing approach; and ascertaining an approach termination condition for avoiding sample damage at least partly on the basis of the deflection of the probe or the oscillation frequency thereof.

Dependencies are inferred from the claim text.