Method for detecting semiconductor carriers using a nanometer-scale microwave probe integrated with an atomic force microscope

Abstract

A method for detecting semiconductor carriers using a nanometer-scale microwave probe in conjunction with an atomic force microscope (AFM). The method optimizes the transmission of microwave signals within the AFM system by determining the optimal carrier frequency for high-frequency measurements. The method includes operating the AFM in tapping mode, emitting a microwave signal from the AFM probe, amplitude modulating the signal, and scanning the semiconductor sample to detect sideband signals. The detected sideband signals are analyzed to identify the optimal carrier frequency for subsequent measurements, such as Scanning Microwave Impedance Microscopy (sMIM) and Sideband Electrostatic Force Microscopy (Sideband-EFM). Additionally, the invention employs impedance matching techniques, including double-stub and multi-stub impedance matching, to enhance the efficiency of microwave signal transmission. This method generates detailed carrier distribution maps of the semiconductor sample, providing crucial insights into the electrical properties of the semiconductor material.

Dependencies are inferred from the claim text.