Sliding member and manufacturing method of sliding member
AssigneesDenso Corporation, Toyota Jidosha Kabushiki Kaisha, MIRISE Technologies Corporation
InventorNobuyuki OTAKE
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Abstract
A sliding member includes a base member and a solid lubricant film disposed to cover the base member. The solid lubricant film is composed of molybdenum disulfide in which a sulfur-to-molybdenum content ratio is 1.33 or less. The molybdenum disulfide constituting the solid lubricant film may contain 11 atomic percent or more of carbon.
Claims6
A sliding member comprising:
- a base member;
- and
- a solid lubricant film disposed to cover the base member, wherein
- the solid lubricant film is composed of molybdenum disulfide in which a sulfur-to-molybdenum content ratio is 1.33 or less.
A manufacturing method of a sliding member that includes a base member and a solid lubricant film disposed to cover the base member and composed of molybdenum disulfide in which a sulfur-to-molybdenum content ratio is 1.33 or less, the manufacturing method comprising:
- forming the solid lubricant film by an atomic layer deposition method using an organic material having a tertiary-butyl group as a sulfur-containing raw material.
Dependencies are inferred from the claim text.