Semiconductor structure and preparation method therefor, functional chip, and electronic device
AssigneeHuawei Technologies Co., Ltd.
InventorsCheng Wang, Jifeng Zhu, Yechang Wang, Jinwen Dong
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AssigneeHuawei Technologies Co., Ltd.
InventorsCheng Wang, Jifeng Zhu, Yechang Wang, Jinwen Dong
Estimating the term…
A semiconductor structure and a preparation method therefor, a functional chip, and an electronic device. The method includes providing a semiconductor layer group, which includes a first dielectric layer, a semiconductor layer, a conductive structure, and an electronic element. A part of the semiconductor layer is removed from a side of a second surface of the semiconductor layer along a first direction, to expose an end face of the conductive structure away from the electronic element. A protection structure is formed on a side of the conductive structure away from the first dielectric layer, where an orthographic projection of the protection structure on the semiconductor layer covers an orthographic projection of the exposed end face of the conductive structure on the semiconductor layer. The part of the semiconductor layer is etched from the side of the second surface of the semiconductor layer along the first direction using the protection structure as a mask.
A method for preparing a semiconductor structure, comprising:
A semiconductor structure, comprising:
A functional chip, comprising at least one semiconductor structure, wherein the at least one semiconductor structure comprises:
Dependencies are inferred from the claim text.