Sensor device

A sensor device for use within a semiconductor manufacturing apparatus to which a gas is supplied, the sensor device comprising:

• a sensor array including
• a first calorimeter,
• a second calorimeter, and
• an insulation material configured to cover the first calorimeter;
• and
• a controller configured to
• identify a first amount of heat transfer in the first calorimeter and a second amount of heat transfer in the second calorimeter,
• generate a corrected second amount by correcting the second amount of heat transfer based on a difference value between the first amount of heat transfer and the second amount of heat transfer, and
• identify a flow velocity of a gas based on the corrected second amount of heat transfer, a temperature of the second calorimeter, an ambient temperature, and a pressure of the gas.

A sensor device for use within a semiconductor manufacturing apparatus to which a gas is supplied, the sensor device comprising:

• a substrate including a plurality of support parts;
• a plurality of sensor arrays on the plurality of support parts;
• each of the plurality of sensor arrays including
• a first pipeline configured to define a flow path in a first direction;
• a first calorimeter within the first pipeline;
• a second pipeline configured to define a flow path in a second direction, the second direction different from the first direction;
• and
• a second calorimeter within the second pipeline;
• and
• a controller configured to
• identify a flow velocity in the first direction based on
• a temperature of the first calorimeter,
• an ambient temperature,
• a first amount of heat transfer, and
• a pressure of the gas,
• identify a flow velocity in the second direction based on
• a temperature of the second calorimeter,
• the ambient temperature,
• a second amount of heat transfer, and
• the pressure of the gas, and
• generate a flow velocity map based on
• the flow velocity in the first direction and the flow velocity in the second direction for a location of each of the plurality of sensor arrays.