Terahertz device

A terahertz device, comprising:

• a substrate including a front surface and a back surface;
• a conductive layer formed on the front surface;
• slots formed in the conductive layer;
• connecting slits formed in the conductive layer;
• and
• active elements disposed in the slots and configured to oscillate or detect electromagnetic waves, wherein
• each of the slots has an annular shape,
• the conductive layer includes
• first electrodes respectively defined by the slots,
• a connection line disposed in the connecting slits and electrically connecting the first electrodes located inside two adjacent ones of the slots, and
• a second electrode located outside the slots,
• each of the connecting slits connects the two adjacent ones of the slots and insulates the connection line from the second electrode,
• the active elements include two active elements provided for each of the first electrodes, and
• the two active elements are located at opposite sides of the corresponding one of the first electrodes with respect to a center of the corresponding one of the slots in a plan view taken from a direction orthogonal to the front surface.