Pressure sensor having high detection performance and optimized manufacturing
AssigneeSTMicroelectronics International N.V.
InventorsFilippo DANIELE, Lorenzo BALDO, Silvia ADORNO, Silvia NICOLI, Anita PREVIDI
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AssigneeSTMicroelectronics International N.V.
InventorsFilippo DANIELE, Lorenzo BALDO, Silvia ADORNO, Silvia NICOLI, Anita PREVIDI
Estimating the term…
A pressure sensor includes a substrate, a deformable detection element suspended on the substrate, and an anchoring structure configured to support the deformable detection element over the substrate. The deformable detection element extends at a distance from the substrate along a first direction and is deformable as a function of a pressure to be detected. The anchoring structure includes anchoring portions extending from the substrate, coupled to the deformable detection element, and arranged at a distance from each other along a second direction transversal to the first direction. A structural region of the anchoring structure extends between the anchoring portions along the second direction and include at least one release opening extending through the structural region.
A pressure sensor, comprising:
A process for manufacturing a pressure sensor, comprising:
Dependencies are inferred from the claim text.