Plating Device for Reduced-Pressure Plating Treatment And Reduced-Pressure Plating Treatment Method
AssigneeMitomo Semicon Engineering Co., Ltd.
InventorYUJI UCHIUMI
Life of this patent
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AssigneeMitomo Semicon Engineering Co., Ltd.
InventorYUJI UCHIUMI
Estimating the term…
A plating treatment technique with which influence of air bubbles or the like can be suppressed as much as possible in plating treatment on micro vias or trenches, and a plurality of plating treatments can be handled by one plating equipment. Plating equipment for vacuum plating treatment including: a plating tank including an opening portion having a seal that prevents leakage of a plating solution, and a solution supply section and a solution discharge section for the plating solution; a rotating unit for the plating tank; an in-tank decompression unit that reduces a pressure in an in-tank space; and an object-to-be-plated back surface press cover including a back surface decompression unit that presses a peripheral edge of an object to be plated placed at the opening portion to decompress in a back space formed on a back surface side of the object to be plated.
A plating equipment for vacuum plating treatment, the plating equipment comprising:
Dependencies are inferred from the claim text.