Augmented manufacturing systems with field-provisioned sensors and algorithms
AssigneeApplied Materials, Inc.
InventorMichael Christopher Howells
Life of this patent
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Abstract
A method includes obtaining, by a processing device, an indication that a first process parameter is to be adjusted and an associated first direction of adjustment. The method further includes obtaining a first pre-set adjustment value associated with the first process parameter. The method further includes adjusting the first process parameter to generate a first adjusted process parameter in view of the first pre-set adjustment value and the first direction of adjustment. The method further includes enacting a process operation in view of the first adjusted process parameter.
Claims40
A method, comprising:
- obtaining, by a processing device, an indication that a first process parameter is to be adjusted, and an associated first direction of adjustment;
- obtaining a first pre-set adjustment value associated with the first process parameter;
- adjusting the first process parameter to generate a first adjusted process parameter in view of the first pre-set adjustment value and the first direction of adjustment;
- and
- enacting a process operation in view of the first adjusted process parameter.
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- obtaining an indication that a first process parameter is to be adjusted, and an associated first direction of adjustment;
- obtaining a first pre-set adjustment value associated with the first process parameter;
- adjusting the first process parameter to generate a first adjusted process parameter in view of the first pre-set adjustment value and the first direction of adjustment;
- and
- enacting a process operation in view of the first adjusted process parameter.
A system comprising a memory and a processing device coupled to the memory, wherein the processing device is configured to:
- obtain an indication that a first process parameter is to be adjusted, and an associated first direction of adjustment;
- obtain a first pre-set adjustment value associated with the first process parameter;
- adjust the first process parameter to generate a first adjusted process parameter in view of the first pre-set adjustment value and the first direction of adjustment;
- and
- enact a process operation in view of the first adjusted process parameter.
A method, comprising:
- obtaining, by a processing device of a tool server coupled to a process tool, an indication that a field-provisioned sensor is to be utilized in connection with a first process operation of the process tool;
- providing to the process tool a data collection plan in view of the field-provisioned sensor;
- obtaining from the process tool an indication of performance of the first process operation;
- and
- providing a trigger to a scanner module associated with the field-provisioned sensor, wherein the scanner module is to activate the field-provisioned sensor based on the trigger.
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device of a process tool to perform operations comprising:
- obtaining an indication that a field-provisioned sensor is to be utilized in connection with a first process operation of the process tool;
- providing to the process tool a data collection plan in view of the field-provisioned sensor;
- obtaining from the process tool an indication of performance of the first process operation;
- and
- providing a trigger to a scanner module associated with the field-provisioned sensor, wherein the scanner module is to activate the field-provisioned sensor based on the trigger.
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is configured to:
- obtain an indication that a field-provisioned sensor is to be utilized in connection with a first process operation of a process tool;
- provide to the process tool a data collection plan in view of the field-provisioned sensor;
- obtain from the process tool an indication of performance of the first process operation;
- and
- provide a trigger to a scanner module associated with the field-provisioned sensor, wherein the scanner module is to activate the field-provisioned sensor based on the trigger.
Dependencies are inferred from the claim text.