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OwnerUlrich SCHOENHOFFinventor
Estimating the term…
An optical module of an assembly in an optical system comprises an optical element, a first number of position actuators for positioning the optical element, at least one additional actuator for damping deformations of the optical element caused by the parasitic mechanical disturbances, at least one sensor for determining the pose of the optical element, and a control circuit for controlling the optical element. A method comprises acquiring at least one sensor signal relating to the pose of the optical element, decomposing the at least one acquired sensor signal into a signal group having at least one pose component and a signal group having at least one deformation component, positioning the optical element on the basis of the pose components, and damping the deformations on the basis of the deformation components. A control circuit controls an optical element.
A method of controlling an optical module of an assembly in a semiconductor lithography projection exposure, the optical module comprising a first actuator configured to position the optical element, a second actuator configured to dampen deformations of the optical element caused by mechanical disturbances, and a sensor configured to determine a pose of the optical element, the method comprising:
A control circuit configured to control an optical element of an optical module of an assembly in a projection exposure apparatus for semiconductor lithography, the control circuit comprising:
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An optical module, comprising:
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Dependencies are inferred from the claim text.