Ultra-precision electron density controller

Abstract

An ultra-precision electron density controller is disclosed. The ultra-precision electron density controller includes: a plate configured to support a sample; an electrode configured to be arranged at a distance of several nanometers from the sample; and a pulse signal control circuit configured to apply a pulse signal to the electrode to form an electric field, control the electric field by adjusting at least one parameter of the pulse signal, and control electron density of the sample through the electric field control. Such an ultra-precision electron density controller may ultra-precisely control electron density of the sample at the nanoscale and simultaneously measure electrical characteristics and optical characteristics.

Dependencies are inferred from the claim text.