Methods for solution-phase analysis of impurities in molybdenum precursors

Abstract

Methods for solution-phase analysis of impurities in molybdenum precursors are provided. The method comprises obtaining a solid composition. The solid composition comprises a first molybdenum oxyhalide compound. The solid composition comprises 5% or less by weight of at least one impurity based on a total weight of the solid composition. The at least one impurity comprises a second molybdenum oxyhalide compound. The second molybdenum oxyhalide compound is different from the first molybdenum oxyhalide compound. The method comprises dissolving the solid composition in a solvent to obtain a solution comprising the first molybdenum oxyhalide compound and the second molybdenum oxyhalide compound. The method comprises detecting a presence of the second molybdenum oxyhalide compound in the solution.

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