Substrate lifting module, substrate processing module, and substrate processing system having the same

A lifting module disposed in a chamber defining a sealed interior space to lift or lower a substrate introduced into the interior space while supporting the substrate, the chamber being provided with at least one gate for entrance and exit of a substrate,

• the lifting module comprising:
• a substrate support disposed in the interior space and supporting the substrate;
• and an upward/downward driving unit coupled to the substrate support to drive upward/downward movement of the substrate support,
• wherein the upward/downward driving unit includes a shaft coupled to the substrate support and extending outwardly through the chamber, and an anti-rotation member coupled to the shaft to prevent circumferential rotation of the shaft about a longitudinal reference axis of the shaft