Centering device, centering method, and substrate processing apparatus

A centering device comprising:

• a first abutting member configured to be capable of contacting an end face of a disk-shaped substrate placed in a horizontal posture on an upper surface of a substrate support;
• a single mover including a first rotary motor configured to move the first abutting member in a horizontal direction;
• a second abutting member and a third abutting member configured to be capable of contacting the end face of the substrate from a side opposite to the first abutting member with respect to the substrate support;
• a multi-mover including a second rotary motor configured to integrally move the second abutting member and the third abutting member in a reverse horizontal direction opposite to the above horizontal direction;
• a controller configured to control the single mover and the multi-mover so that the first abutting member, the second abutting member, and the third abutting member sandwich the substrate by movement of the first abutting member in the horizontal direction and movement of the second and third abutting members in the reverse horizontal direction, thereby positioning the substrate on the substrate support such that a center of the substrate coincides with a center of the substrate support, wherein
• the multi-mover further includes a slider configured to be movable in the reverse horizontal direction while integrally supporting the second abutting member and the third abutting member in a state in which the first abutting member, the second abutting member, and the third abutting member surround a center of the substrate support portion as viewed in a plan view from vertically above, and
• the second rotary motor is configured to generate a driving force for moving the slider in the reverse horizontal direction.