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US 2026/0107671 A1Published application
Deposition mask, and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Kuk KIM, Duck Jung LEE, Sug Woo JUNG, Ji Hyun JUNG
Life of this patent
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Abstract
A deposition mask includes a mask frame having a cell opening, a membrane having a plurality of pixel openings disposed on the cell opening and disposed on the mask frame, and a first reinforcing member disposed on an upper inner side surface of the cell opening, connected to the membrane, and having a ring shape in a plan view.
Claims20
A deposition mask comprising:
- a mask frame having a cell opening;
- a membrane having a plurality of pixel openings disposed on the cell opening and disposed on the mask frame;
- and
- a first reinforcing member disposed on an upper inner side surface of the cell opening, connected to the membrane, and having a ring shape in a plan view.
1 more element
A method of manufacturing a deposition mask, comprising:
- forming a trench having a ring shape in a surface portion of a substrate in a plan view;
- forming an upper inorganic film on the substrate to fill the trench such that a first reinforcing member having a ring shape in the plan view is formed in the trench;
- forming a plurality of pixel openings penetrating the upper inorganic film in an area overlapping an area surrounded by the first reinforcing member in the plan view to form a membrane having the pixel openings;
- and
- patterning the substrate to form a cell opening exposing the first reinforcing member and the pixel openings.
2 more elements
An electronic device comprising a display panel,
- wherein the display panel comprises:
- a substrate;
- and
- light emitting layers formed on the substrate by using a deposition mask, and
- the deposition mask comprises:
- a mask frame having a cell opening;
- a membrane having a plurality of pixel openings disposed on the cell opening and disposed on the mask frame;
- and
- a first reinforcing member disposed on an upper inner side surface of the cell opening, connected to the membrane, and having a ring shape in a plan view,
- wherein the light emitting layers are formed by a deposition process that provides a vapor deposition material onto the substrate through the cell opening and the plurality of pixel openings.
7 more elements
Dependencies are inferred from the claim text.