Edge detection in an image of a semiconductor specimen

A computer-implemented method comprising:

• obtaining an image informative of at least part of at least one structural element of a semiconductor specimen,
• using the image to generate one or more filters,
• performing a comparison between:
• each given area of a plurality of areas of the image, and
• the one or more filters,
• and
• determining, based on the comparison, a set of points of the image, informative of an estimated position of at least one edge of the at least one structural element in the image, the set of points comprising, for each given row of a plurality of rows of the image, or for each given column of a plurality of columns of the image, at least one given point of the given row or of the given column of the image.

A non-transitory computer readable medium comprising instructions that, when executed by at least one or more processing circuitries, cause the at least one or more processing circuitries to perform:

• obtaining an image of at least part of at least one structural element of a semiconductor specimen,
• using the image to generate one or more filters,
• performing a comparison between:
• each given area of a plurality of areas of the image, and
• the one or more filters,
• and
• determining, based on the comparison, a set of points of the image, informative of an estimated position of at least one edge of the at least one structural element in the image, the set of points comprising, for each given row of a plurality of rows of the image, or for each given column of a plurality of columns of the image, at least one given point of the given row or of the given column of the image.