Valve and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorManabu HONMA
Life of this patent
Estimating the term…
Abstract
A valve includes: a housing having a flow path of fluid in the housing; and a valve body provided rotatably with respect to the housing, and configured to open and close the flow path, wherein the housing has a housing seal surface that surrounds the flow path, wherein the valve body has a valve body seal surface, which is formed on an outer periphery portion of the valve body and faces the housing seal surface when the valve body is located at a closing position for closing the flow path, and wherein the valve body seal surface faces a closing rotation direction of the valve body for closing the flow path, over an entire circumference of the outer periphery portion.
Claims11
A valve comprising:
- a housing having a flow path of fluid in the housing;
- and
- a valve body provided rotatably with respect to the housing, and configured to open and close the flow path,
- wherein the housing has a housing seal surface that surrounds the flow path,
- wherein the valve body has a valve body seal surface, which is formed on an outer periphery portion of the valve body and faces the housing seal surface when the valve body is located at a closing position for closing the flow path, and
- wherein the valve body seal surface faces a closing rotation direction of the valve body for closing the flow path, over an entire circumference of the outer periphery portion.
A substrate processing apparatus comprising:
- a processing container configured to accommodate and process a substrate;
- an exhaust path connected to the processing container and configured to discharge a gas from the processing container;
- and
- a valve provided in the exhaust path and configured to control a flow of the gas in the exhaust path,
- wherein the valve includes:
- a housing having a flow path of a fluid in the housing;
- and
- a valve body provided rotatably with respect to the housing and configured to open and close the flow path,
- wherein the housing has a housing seal surface that surrounds the flow path,
- wherein the valve body has a valve body seal surface, which is formed on an outer periphery portion of the valve body and faces the housing seal surface when the valve body is located at a closing position for closing the flow path, and
- wherein the valve body seal surface faces a closing rotation direction of the valve body for closing the flow path, over an entire circumference of the outer periphery portion.
Dependencies are inferred from the claim text.