Substrate, method of inspecting the substrate, and electronic device including the substrate
AssigneeSamsung Display Co., Ltd.
InventorHYUNGJIN LEE
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AssigneeSamsung Display Co., Ltd.
InventorHYUNGJIN LEE
Estimating the term…
A method of inspecting the substrate according to an embodiment of the present disclosure may include placing a substrate including a plurality of cells, a first alignment key, and a second alignment key spaced apart from the first alignment key in a plan view on a stage, performing a first correcting which corrects misalignment of a first camera using the first alignment key, obtaining a first image by capturing an image of the substrate with the first camera, detecting a foreign substance in the first image, moving the stage such that the substrate overlaps a second camera in a plan view, performing a second correcting which corrects misalignment of the second camera using the second alignment key, and obtaining a second image by capturing, with the second camera, an image of a cell among the cells in which the foreign substance is detected.
A method of inspecting a substrate comprising:
A substrate comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.