Back to results
US 2026/0101706 A1Published application
Contaminant detection device
AssigneeSamsung Electronics Co., Ltd.
InventorsHyejin JANG, Donghoon KWON
Life of this patent
Estimating the term…
Abstract
A contaminant detection device includes: a contact module configured to contact a wafer; a detection module on the contact module, the detector being configured to change color by reacting with a metal ion; and a sensing module configured to sense a color change of the detection module.
Claims20
A contaminant detection device comprising:
- a contact module configured to contact a wafer;
- a detection module on the contact module, the detector being configured to change color by reacting with a metal ion;
- and
- a sensing module configured to sense a color change of the detection module.
1 more element
A contaminant detection device comprising:
- a head configured to mount a wafer thereon and rotate about a head axis;
- a detection module configured to react with a metal ion;
- a polishing pad on which the detection module is disposed to be exposed toward one surface of the wafer;
- and
- a sensing module connected to the head and configured to sense a color change of the detection module.
2 more elements
A contaminant detection device comprising:
- a brush comprising a detection module in at least a portion of a main body and a plurality of protrusions, wherein the detection module comprises a detection component configured to react with a metal ion;
- a cleaning module configured to clean the brush;
- and
- a sensing module that is mounted on the cleaning module and senses a color change of the detection module.
1 more element
Dependencies are inferred from the claim text.